Effect of nitrogen on competitive growth mechanisms of diamond thin films

V. M. Ayres*, T. R. Bieler, M. G. Kanatzidis, J. Spano, S. Hagopian, H. Balhareth, B. F. Wright, M. Farhan, J. Abdul Majeed, D. Spach, B. L. Wright, J. Asmussen

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

13 Scopus citations

Abstract

The correlation between surface morphology and texture (distribution of crystal orientations) has been analyzed to determine how nitrogen provides a competitive growth advantage for the formation of 〈001〉 texture in diamond films. The film morphologies were measured using TappingModeTM atomic force microscopy. Corresponding texture studies were performed using X-ray diffraction with a four-circle goniometer to measure (111), (220) and (400) pole figures. Orientation distributions were generated from the pole figures, from which inverse pole figures were made to quantify how texture was affected by process variables. After 2 h of growth, with and without nitrogen, similar textures were observed. With increasing time, nitrogen stimulates the growth of orientations between 〈001〉, 〈114〉, and 〈104〉. Without nitrogen, the majority orientation is 〈101〉 with a secondary component near 〈113〉. Examination of fracture surfaces indicates correlations with the observed texture and morphology changes.

Original languageEnglish (US)
Pages (from-to)236-240
Number of pages5
JournalDiamond and Related Materials
Volume9
Issue number3
DOIs
StatePublished - Jan 1 2000
Event10th European Conference on Diamond, Diamond-like Materials, Carbon Nanotubes, Nitrides and Silicon Carbide - Prague, Czech Republic
Duration: Sep 12 1999Sep 17 1999

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Physics and Astronomy(all)
  • Materials Chemistry
  • Electrical and Electronic Engineering

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