Effective elastic constants and acoustic properties of single-crystal TiN/NbN superlattices

Jin O. Kim, Meenam Shinn, Scott A. Barnett

Research output: Contribution to journalArticlepeer-review

31 Scopus citations

Abstract

Using the measured elastic constants of TiN and NbN single crystals with cubic symmetry, the effective elastic constants of single-crystal TiN/NbN superlattice films with tetragonal symmetry, namely c11c12c13c33c44and c66have been calculated for various thickness ratios of the layers. Using a line-focus acoustic microscope, measurements of surface acoustic waves (SAWs) have been carried out on single-crystal TiN/NbN superlattice films grown on the (001) plane of cubic crystal MgO substrates. The phase velocities measured as functions of the angle of propagation display the expected anisotropic nature of cubic crystals. Dispersion curves of SAWs propagating along the symmetry axes have been obtained by measuring wave velocities for various film thicknesses and frequencies. The SAW dispersion curves calculated from the effectiveelastic constants and the effective mass density of the superlattice films show very good agreement with experimental results. The results of this paper exhibit no anomalous dependence of the elastic constants on the superlattice period of TiN/NbN superlattices.

Original languageEnglish (US)
Pages (from-to)2248-2256
Number of pages9
JournalJournal of Materials Research
Volume7
Issue number8
DOIs
StatePublished - Aug 1992

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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