Effective elastic constants of superlattice films measured by line-focus acoustic microscopy

Jin O. Kim, Jan D. Achenbach, Meenam Shinn, Scott A. Barnett

Research output: Contribution to journalArticle

2 Scopus citations

Abstract

The effective elastic constants of single-crystal nitride superlattice films have been determined by calculation and by measurement methods. The calculation method uses formulas to calculate the effective elastic constants of superlattices from the measured elastic constants of the constituent layers. The calculated effective elastic constants are tested by comparing the corresponding surface acoustic wave (SAW) velocities calculated for thin-film/substrate systems with the corresponding SAW velocities measured by line-focus acoustic microscopy (LFAM). The measurement method determines the effective elastic constants of the superlattices directly from the SAW velocity dispersion data measured by LFAM. Two kinds of superlattice films are considered: one has relatively fiat and sharp interfaces between layers, and the other has rough interfaces with interdiffusion. The calculation method has yielded very good results for the superlattices with flat and sharp interfaces but not for the superlattices with rough interfaces. The measurement method yields results for both kinds, with the restriction that the constituent layers have similar crystal symmetries.

Original languageEnglish (US)
Pages (from-to)395-401
Number of pages7
JournalJournal of Engineering Materials and Technology, Transactions of the ASME
Volume117
Issue number4
DOIs
StatePublished - Oct 1995

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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