EFFECTS OF ION TRANSPORT ON PLASMA OXIDATION OF SILICON.

R. P H Chang*, J. Siejka, J. Perriere, M. Croset

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations
Original languageEnglish (US)
Title of host publicationProceedings - The Electrochemical Society
PublisherElectrochem Soc Inc
Pages38-44
Number of pages7
Volume82-6
StatePublished - Dec 1 1982

ASJC Scopus subject areas

  • Engineering(all)

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