Effects of Nanometer-Thick Passivation Layers on the Mechanical Response of Thin Gold Films

Bart C. Prorok; Horacio D. Espinosa

doi:10.1166/jnn.2002.113

Effects of Nanometer-Thick Passivation Layers on the Mechanical Response of Thin Gold Films

Bart C. Prorok, Horacio D. Espinosa^*

^*Corresponding author for this work

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

30 Scopus citations

Abstract

The mechanical behavior of freestanding gold membranes 0.5 μm thick with and without passivation layers was studied with a membrane deflection experiment. Membrane width was varied from 2.5 to 20 μm to investigate size effects. The presence of the passivation layer had the effect of reducing the membrane strength. Yield stress, as well as fracture strain and stress, were all found to be significantly lower for the passivated specimens. The residual stress state was found to be significantly larger with passivation, to the degree of generating prestressed cracks at micromachined notches. Membrane width had the greatest effect on the residual stress state with smaller widths having larger residual stress.

Original language	English (US)
Pages (from-to)	427-433
Number of pages	7
Journal	Journal of Nanoscience and Nanotechnology
Volume	2
Issue number	3-4
DOIs	https://doi.org/10.1166/jnn.2002.113
State	Published - Jun 2002

Keywords

CMOS Device
Gold Thin Films
Membrane
Passivation Layers
Stress-Strain

ASJC Scopus subject areas

Bioengineering
Chemistry(all)
Biomedical Engineering
Materials Science(all)
Condensed Matter Physics

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abstract = "The mechanical behavior of freestanding gold membranes 0.5 μm thick with and without passivation layers was studied with a membrane deflection experiment. Membrane width was varied from 2.5 to 20 μm to investigate size effects. The presence of the passivation layer had the effect of reducing the membrane strength. Yield stress, as well as fracture strain and stress, were all found to be significantly lower for the passivated specimens. The residual stress state was found to be significantly larger with passivation, to the degree of generating prestressed cracks at micromachined notches. Membrane width had the greatest effect on the residual stress state with smaller widths having larger residual stress.",

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AU - Espinosa, Horacio D.

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AB - The mechanical behavior of freestanding gold membranes 0.5 μm thick with and without passivation layers was studied with a membrane deflection experiment. Membrane width was varied from 2.5 to 20 μm to investigate size effects. The presence of the passivation layer had the effect of reducing the membrane strength. Yield stress, as well as fracture strain and stress, were all found to be significantly lower for the passivated specimens. The residual stress state was found to be significantly larger with passivation, to the degree of generating prestressed cracks at micromachined notches. Membrane width had the greatest effect on the residual stress state with smaller widths having larger residual stress.

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KW - Membrane

KW - Passivation Layers

KW - Stress-Strain

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Effects of Nanometer-Thick Passivation Layers on the Mechanical Response of Thin Gold Films

Abstract

Keywords

ASJC Scopus subject areas

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