Elastic constants of single-crystal superlattice films determined by line-focus acoustic microscopy

Jin O. Kim*, Jan Drewes Achenbach, Meenam Shinn, Scott A Barnett

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The elastic constants of single-crystal TiN and NbN films have been determined from anisotropic surface acoustic wave (SAW) dispersion data measured by line-focus acoustic microscopy. From the elastic constants of the TiN and NbN films, the effective elastic constants of single-crystal TiN/NbN superlattice films have been calculated. Using the acoustic microscope, measurements of SAWs have also been carried out on TiN/NbN superlattice films grown on (001) MgO substrates. The phase velocities measured as functions of the angle of propagation display the expected symmetric anisotropy. Dispersion curves of SAWs propagating along the symmetry axes have been obtained by measuring wave velocities for various film thicknesses and frequencies. The SAW dispersion curves calculated from the effective elastic constants and the effective mass density of the superlattice films show very good agreement with experimental results.

Original languageEnglish (US)
Title of host publicationAcousto-Optics and Acoustic Microscopy
PublisherPubl by ASME
Pages13-27
Number of pages15
Volume140
ISBN (Print)0791810755
StatePublished - Dec 1 1992
EventWinter Annual Meeting of the American Society of Mechanical Engineers - Anaheim, CA, USA
Duration: Nov 8 1992Nov 13 1992

Other

OtherWinter Annual Meeting of the American Society of Mechanical Engineers
CityAnaheim, CA, USA
Period11/8/9211/13/92

ASJC Scopus subject areas

  • Mechanical Engineering

Fingerprint Dive into the research topics of 'Elastic constants of single-crystal superlattice films determined by line-focus acoustic microscopy'. Together they form a unique fingerprint.

Cite this