Abstract
The elastic constants of single-crystal TiN and NbN films have been determined from anisotropic surface acoustic wave (SAW) dispersion data measured by line-focus acoustic microscopy. From the elastic constants of the TiN and NbN films, the effective elastic constants of single-crystal TiN/NbN superlattice films have been calculated. Using the acoustic microscope, measurements of SAWs have also been carried out on TiN/NbN superlattice films grown on (001) MgO substrates. The phase velocities measured as functions of the angle of propagation display the expected symmetric anisotropy. Dispersion curves of SAWs propagating along the symmetry axes have been obtained by measuring wave velocities for various film thicknesses and frequencies. The SAW dispersion curves calculated from the effective elastic constants and the effective mass density of the superlattice films show very good agreement with experimental results.
| Original language | English (US) |
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| Title of host publication | Acousto-Optics and Acoustic Microscopy |
| Publisher | Publ by ASME |
| Pages | 13-27 |
| Number of pages | 15 |
| Volume | 140 |
| ISBN (Print) | 0791810755 |
| State | Published - Dec 1 1992 |
| Event | Winter Annual Meeting of the American Society of Mechanical Engineers - Anaheim, CA, USA Duration: Nov 8 1992 → Nov 13 1992 |
Other
| Other | Winter Annual Meeting of the American Society of Mechanical Engineers |
|---|---|
| City | Anaheim, CA, USA |
| Period | 11/8/92 → 11/13/92 |
ASJC Scopus subject areas
- Mechanical Engineering