Elasticity, strength, and toughness of single crystal silicon carbide, ultrananocrystalline diamond, and hydrogen-free tetrahedral amorphous carbon

Horacio Dante Espinosa*, B. Peng, N. Moldovan, T. A. Friedmann, X. Xiao, D. C. Mancini, O. Auciello, J. Carlisle, C. A. Zorman, M. Merhegany

*Corresponding author for this work

Research output: Contribution to journalArticle

61 Scopus citations

Abstract

In this work, the authors report the mechanical properties of three emerging materials in thin film form: single crystal silicon carbide (3C-SiC), ultrananocrystalline diamond, and hydrogen-free tetrahedral amorphous carbon. The materials are being employed in micro- and nanoelectromechanical systems. Several reports addressed some of the mechanical properties of these materials but they are based in different experimental approaches. Here, they use a single testing method, the membrane deflection experiment, to compare these materials' Young's moduli, characteristic strengths, fracture toughnesses, and theoretical strengths. Furthermore, they analyze the applicability of Weibull theory [Proc. Royal Swedish Inst. Eng. Res. 153, 1 (1939); ASME J. Appl. Mech. 18, 293 (1951)] in the prediction of these materials' failure and document the volume-or surface-initiated failure modes by fractographic analysis. The findings are of particular relevance to the selection of micro- and nanoelectromechanical systems materials for various applications of interest.

Original languageEnglish (US)
Article number073111
JournalApplied Physics Letters
Volume89
Issue number7
DOIs
StatePublished - Aug 25 2006

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Fingerprint Dive into the research topics of 'Elasticity, strength, and toughness of single crystal silicon carbide, ultrananocrystalline diamond, and hydrogen-free tetrahedral amorphous carbon'. Together they form a unique fingerprint.

  • Cite this

    Espinosa, H. D., Peng, B., Moldovan, N., Friedmann, T. A., Xiao, X., Mancini, D. C., Auciello, O., Carlisle, J., Zorman, C. A., & Merhegany, M. (2006). Elasticity, strength, and toughness of single crystal silicon carbide, ultrananocrystalline diamond, and hydrogen-free tetrahedral amorphous carbon. Applied Physics Letters, 89(7), [073111]. https://doi.org/10.1063/1.2336220