Electro-optic waveguide modulators by the integration of self-assembled superlattices with polymeric and semiconductor materials

Tobin J. Marks*, Seng Tiong Ho, Zhifu Liu, Peiwang Zhu, De Gui Sun, Jing Ma, Yegao Xiao, Hu Kang

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

9 Scopus citations


We describe here the fabrication and characterization of novel organic electro-optic materials composed of self-assembled superlattices. The SAS structures are intrinsically acentric and exhibit large second harmonic generation and electro-optic responses. This approach using SAS electro-optic materials has advantages such as not requiring poling for creating nonlinearity in the films and efficient film growth on a variety of substrates over large areas. Prototype waveguide electro-optic modulators have been fabricated using SAS films integrated with low-loss polymeric materials functioning as partial guiding and cladding layers. The waveguide EO modulators are fabricated using a multistep process including e-beam deposition, plasma-enhanced chemical vapor deposition, photolithography, and reactive ion etching. Electro-optic parameters such as the half-wave voltage and the effective electro-optic coefficient, and the velocity mismatch between the optical and radio frequency waves have been evaluated.

Original languageEnglish (US)
Pages (from-to)133-143
Number of pages11
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2003
EventPROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Organic Photonic Materials and Devices V - San Jose, CA, United States
Duration: Jan 27 2003Jan 30 2003


  • Electro-optic materials
  • Electro-optic modulators
  • Polymers
  • Self-assembled superlattices
  • Thin films

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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