Electrochemical deposition of (Bi,Sb)2Te3 for thermoelectric microdevices

J. P. Fleurial*, J. A. Herman, G. J. Snyder, M. A. Ryan, A. Borshchevsky, C. K. Huang

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review


New experimental methods have been developed to electrochemically deposit p-type Sbrich Bi2-xSbxTe3, Pb-doped and Bi-doped Bi2Te3, and PbTe thick films. Some of the deposited films were dense and had a smooth surface morphology. These films were deposited potentiostatically at room temperature in an acidic aqueous electrolyte. Experimental deposition of Bi2Te3 alloys into various thick nanoporous templates made out of anodized alumina has also been achieved. Miniaturized thermoelements for microdevices (25 μm tall, 60 μm diameter) were grown by plating through thick photoresist templates. The experimental techniques developed, as well as the transport properties of some of the films and filled templates, will be presented.

Original languageEnglish (US)
JournalProceedings - IEEE International Symposium on Circuits and Systems
StatePublished - Jan 1 2001
EventIEEE International Symposium on Circuits and Systems (ISCAS 2001) - Sydney, NSW, Australia
Duration: May 6 2001May 9 2001

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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