@inproceedings{efdf17a9176c412a865c7af73b149f91,
title = "Electromechanical and microwave S-parameter properties of a wide tuning range MEMS tunable capacitor",
abstract = "We present the electromechanical and microwave properties of a novel micromachined parallel-plate tunable capacitor with a wide tuning range. Different from conventional two-parallel-plate tunable capacitors, this novel tunable capacitor consists of one suspended top plate and two fixed bottom plates. One of the two fixed plates and the top plate form a variable capacitor, whereas the other fixed plate and the top plate are used to provide electrostatic actuation for capacitance tuning. For the fabricated prototype tunable capacitors, a maximum tuning range of 69.8% has been achieved experimentally, exceeding the theoretical tuning range limit (50%) of conventional two-parallel-plate tunable capacitors. This novel tunable capacitor also exhibits very low return loss (< 0.6dB between 45 MHz and 10GHz).",
keywords = "Dynamic, S-parameter, Simulation, Tunable capacitor",
author = "Jinghong Chen and Jun Zou and Chang Liu and Kang, {Sung Mo}",
year = "2001",
language = "English (US)",
isbn = "0970827504",
series = "2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001",
pages = "318--321",
editor = "M. Laudon and B. Romanowicz",
booktitle = "2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001",
note = "2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001 ; Conference date: 19-03-2001 Through 21-03-2001",
}