Epitaxial ferroelectric BaTiO3 thin films for microphotonic applications

F. Niu*, A. R. Teren, B. H. Hoerman, B. W. Wessels

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

6 Scopus citations


Epitaxial ferroelectric BaTiO3 thin films have been developed as a material for microphotonics. Efforts have been directed toward developing these materials for thin film electro-optic modulators. Films were deposited by metalorganic chemical vapor deposition (MOCVD) on both MgO and silicon substrates. The electro-optic properties of the thin films were measured. For BaTiO3 thin films grown on (100) MgO substrates, the effective electrooptic coefficient, reff depended on the magnitude and direction of the electric field. Coefficients as high as 260 pm/V have been measured. Investigation of BaTiO3 films on silicon has been undertaken. Epitaxial BaTiO3 thin films were deposited by MOCVD on (100) MgO layers grown on silicon (100) substrates by metal-organic molecular beam epitaxy (MOMBE). The MgO serves as the low index optical cladding layer as well as an insulating layer. X-ray diffraction and transmission electron microscopy (TEM) indicated that BaTiO3 was epitaxial with an orientational relation given by BaTiO3 (100)//Si (100) and BaTiO3 [011 ]//Si [011]. Polarization measurements indicated that the BaTiO3 epitaxial films on Si were in the ferroelectric state.

Original languageEnglish (US)
Pages (from-to)E191-E196
JournalMaterials Research Society Symposium - Proceedings
StatePublished - 2001
EventMicrophotonics - Materials, Physics and Applications - Boston, MA, United States
Duration: Nov 27 2000Nov 29 2000

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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