Erratum to "Al2O3 thin film growth on Si (100) using binary reaction sequence chemistry" [Thin Solid Films 292 (1997) 135-144] (DOI: 10.1016/S0040-6090(96)08934-1)

A. W. Ott*, J. W. Klaus, J. M. Johnson, S. M. George

*Corresponding author for this work

Research output: Contribution to journalComment/debatepeer-review

1 Scopus citations
Original languageEnglish (US)
Number of pages1
JournalThin Solid Films
Issue number20
StatePublished - Aug 31 2009

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

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