Chad Mirkin (Inventor)
Research output: Patent
}
TY - PAT
T1 - ETCHING AND HOLE ARRAYS
AU - Mirkin, Chad
N1 - filingdate: 2007-6-28 issueddate: 2012-6-5 Status: published attorneydocketnumber: 2006-100-09
PY - 2012/7/31
Y1 - 2012/7/31
M3 - Patent
M1 - 8192795
ER -