Etching of ZnO towards the Development of ZnO Homostructure LEDs

Kathryn Minder*, Ferechteh Hosseini Teherani, Dave Rogers, Can Bayram, Ryan McClintock, Patrick Kung, Manijeh Razeghi

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Scopus citations


Although ZnO has recently gained much interest as an alternative to the III-Nitride material system, the development of ZnO based optoelectonic devices is still in its infancy. Significant material breakthroughs in p-type doping of ZnO thin films and improvements in crystal growth techniques have recently been achieved, making the development of optoelectonic devices possible. ZnO is known to be an efficient UV-emitting material (∼380 nm) at room temperature, optical UV lasing of ZnO has been achieved, and both homojunction and hybrid heterojunction LEDs have been demonstrated. In this paper, processing techniques are explored towards the achievement of a homo-junction ZnO LED. First, a survey of current ZnO processing methods is presented, followed by the results of our processing research. Specifically, we have examined etching through an n-ZnO layer to expose and make contact to a p-ZnO layer.

Original languageEnglish (US)
Title of host publicationZinc Oxide Materials and Devices II
StatePublished - May 24 2007
EventZinc Oxide Materials and Devices II - San Jose, CA, United States
Duration: Jan 21 2007Jan 24 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherZinc Oxide Materials and Devices II
Country/TerritoryUnited States
CitySan Jose, CA


  • Etching
  • Light-emitting diode
  • Processing
  • Ultraviolet
  • ZnO

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


Dive into the research topics of 'Etching of ZnO towards the Development of ZnO Homostructure LEDs'. Together they form a unique fingerprint.

Cite this