Expedient route to volatile zirconium metal-organic chemical vapor deposition precursors using amide synthons and implementation in yttria-stabilized zirconia film growth

John A. Belot, Richard J. McNeely, Anchuan Wang, Charles J. Reedy, Tobin J. Marks*, Glenn P.A. Yap, Arnold L. Rheingold

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

13 Scopus citations

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