Expeditious, scalable solution growth of metal oxide films by combustion blade coating for flexible electronics

Binghao Wang, Peijun Guo, Li Zeng, Xia Yu, Aritra Sil, Wei Huang, Matthew J. Leonardi, Xinan Zhang, Gang Wang, Shaofeng Lu, Zhihua Chen, Michael J. Bedzyk, Richard D. Schaller, Tobin J. Marks*, Antonio Facchetti

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

34 Scopus citations


Metal oxide (MO) semiconductor thin films prepared from solution typically require multiple hours of thermal annealing to achieve optimal lattice densification, efficient charge transport, and stable device operation, presenting a major barrier to roll-to-roll manufacturing. Here, we report a highly efficient, cofuel-assisted scalable combustion blade-coating (CBC) process for MO film growth, which involves introducing both a fluorinated fuel and a preannealing step to remove deleterious organic contaminants and promote complete combustion. Ultrafast reaction and metal–oxygen–metal (M-O-M) lattice condensation then occur within 10–60 s at 200–350 °C for representative MO semiconductor [indium oxide (In2O3), indium-zinc oxide (IZO), indium-gallium-zinc oxide (IGZO)] and dielectric [aluminum oxide (Al2O3)] films. Thus, wafer-scale CBC fabrication of IGZO-Al2O3 thin-film transistors (TFTs) (60-s annealing) with field-effect mobilities as high as ∼25 cm2 V−1 s−1 and negligible threshold voltage deterioration in a demanding 4,000-s bias stress test are realized. Combined with polymer dielectrics, the CBC-derived IGZO TFTs on polyimide substrates exhibit high flexibility when bent to a 3-mm radius, with performance bending stability over 1,000 cycles.

Original languageEnglish (US)
Pages (from-to)9230-9238
Number of pages9
JournalProceedings of the National Academy of Sciences of the United States of America
Issue number19
StatePublished - May 7 2019


  • Blade coating
  • Combustion synthesis
  • Solution process
  • Thin-film transistor
  • Ultrashort annealing time

ASJC Scopus subject areas

  • General


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