Experimental and Numerical study on Micro-Stereolithography of Ceramics

C. Sun; X. N. Jiang; X. Zhang

doi:10.1115/IMECE1999-0289

Experimental and Numerical study on Micro-Stereolithography of Ceramics

C. Sun, X. N. Jiang, X. Zhang

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Micro-stereolithography (μSL) uses laser light to solidify UV-curable resin mixed with concentrated ceramic powders. During the μSL process, the light scattering from the particle suspension is found to significantly influence the fabrication resolution and curing depth which are critical for the complex 3D microfabrication. In this work, we developed a novel doping technique to substantially reduce the light scattering; thus, enhance the fabrication precision and control. Both Monte-Carlo simulations and experimental studies are carried out to understand the detailed micro-scale optical scattering, chemical reaction (polymerization) and their influences to fabricated line-width.

Original language	English (US)
Title of host publication	Micro-Electro-Mechanical Systems (MEMS)
Publisher	American Society of Mechanical Engineers (ASME)
Pages	339-345
Number of pages	7
ISBN (Electronic)	9780791816387
DOIs	https://doi.org/10.1115/IMECE1999-0289
State	Published - 1999
Externally published	Yes
Event	ASME 1999 International Mechanical Engineering Congress and Exposition, IMECE 1999 - Nashville, United States Duration: Nov 14 1999 → Nov 19 1999

Publication series

Name	ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
Volume	1999-W

Conference

Conference	ASME 1999 International Mechanical Engineering Congress and Exposition, IMECE 1999
Country/Territory	United States
City	Nashville
Period	11/14/99 → 11/19/99

ASJC Scopus subject areas

Mechanical Engineering

Access to Document

10.1115/IMECE1999-0289

Cite this

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title = "Experimental and Numerical study on Micro-Stereolithography of Ceramics",

abstract = "Micro-stereolithography (μSL) uses laser light to solidify UV-curable resin mixed with concentrated ceramic powders. During the μSL process, the light scattering from the particle suspension is found to significantly influence the fabrication resolution and curing depth which are critical for the complex 3D microfabrication. In this work, we developed a novel doping technique to substantially reduce the light scattering; thus, enhance the fabrication precision and control. Both Monte-Carlo simulations and experimental studies are carried out to understand the detailed micro-scale optical scattering, chemical reaction (polymerization) and their influences to fabricated line-width.",

author = "C. Sun and Jiang, {X. N.} and X. Zhang",

note = "Publisher Copyright: {\textcopyright} 1999 American Society of Mechanical Engineers (ASME). All rights reserved.; ASME 1999 International Mechanical Engineering Congress and Exposition, IMECE 1999 ; Conference date: 14-11-1999 Through 19-11-1999",

year = "1999",

doi = "10.1115/IMECE1999-0289",

language = "English (US)",

series = "ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)",

publisher = "American Society of Mechanical Engineers (ASME)",

pages = "339--345",

booktitle = "Micro-Electro-Mechanical Systems (MEMS)",

}

Sun, C, Jiang, XN & Zhang, X 1999, Experimental and Numerical study on Micro-Stereolithography of Ceramics. in Micro-Electro-Mechanical Systems (MEMS). ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE), vol. 1999-W, American Society of Mechanical Engineers (ASME), pp. 339-345, ASME 1999 International Mechanical Engineering Congress and Exposition, IMECE 1999, Nashville, United States, 11/14/99. https://doi.org/10.1115/IMECE1999-0289

Experimental and Numerical study on Micro-Stereolithography of Ceramics. / Sun, C.; Jiang, X. N.; Zhang, X.
Micro-Electro-Mechanical Systems (MEMS). American Society of Mechanical Engineers (ASME), 1999. p. 339-345 (ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE); Vol. 1999-W).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Experimental and Numerical study on Micro-Stereolithography of Ceramics

AU - Sun, C.

AU - Jiang, X. N.

AU - Zhang, X.

PY - 1999

Y1 - 1999

N2 - Micro-stereolithography (μSL) uses laser light to solidify UV-curable resin mixed with concentrated ceramic powders. During the μSL process, the light scattering from the particle suspension is found to significantly influence the fabrication resolution and curing depth which are critical for the complex 3D microfabrication. In this work, we developed a novel doping technique to substantially reduce the light scattering; thus, enhance the fabrication precision and control. Both Monte-Carlo simulations and experimental studies are carried out to understand the detailed micro-scale optical scattering, chemical reaction (polymerization) and their influences to fabricated line-width.

AB - Micro-stereolithography (μSL) uses laser light to solidify UV-curable resin mixed with concentrated ceramic powders. During the μSL process, the light scattering from the particle suspension is found to significantly influence the fabrication resolution and curing depth which are critical for the complex 3D microfabrication. In this work, we developed a novel doping technique to substantially reduce the light scattering; thus, enhance the fabrication precision and control. Both Monte-Carlo simulations and experimental studies are carried out to understand the detailed micro-scale optical scattering, chemical reaction (polymerization) and their influences to fabricated line-width.

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M3 - Conference contribution

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SP - 339

EP - 345

BT - Micro-Electro-Mechanical Systems (MEMS)

PB - American Society of Mechanical Engineers (ASME)

T2 - ASME 1999 International Mechanical Engineering Congress and Exposition, IMECE 1999

Y2 - 14 November 1999 through 19 November 1999

ER -

Experimental and Numerical study on Micro-Stereolithography of Ceramics

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ASJC Scopus subject areas

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