Extreme water-repellant surface enabled by nano-micro integrated texture

Yongjoo Kwon, Junkyu Choi, Neelesh Patankar, Junghoo Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

A super hydrophobic surface is realized by forming double roughness on a silicon surface. A deep silicon etching and a gas phase isotropic silicon etching (XeF2) are used as the fabrication method for two different scales of roughness. Combination of these two techniques enables the uniform formation of double roughness on a silicon surface. The fabricated surface shows the tendency of preferring Cassie state [1] to Wenzel state [2] and a durable super hydrophobic property. Through a series of experiments, this study also offers a verification of the previous theoretical prediction [3] for the amplification of contact angle on a surface with double roughness.

Original languageEnglish (US)
Title of host publicationProceedings of the 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007
EditorsJean-Louis Viovy, Patrick Tabeling, Stephanie Descroix, Laurent Malaquin
PublisherChemical and Biological Microsystems Society
Pages1795-1797
Number of pages3
ISBN (Electronic)9780979806407
StatePublished - 2007
Event11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007 - Paris, France
Duration: Oct 7 2007Oct 11 2007

Publication series

NameProceedings of the 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007

Conference

Conference11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007
Country/TerritoryFrance
CityParis
Period10/7/0710/11/07

Funding

This work was supported by the NSI-NCRC program of KOSEF (R15-2003-032-01002-0(2006)), and Micro Thermal System Research Center (ERC) (R11-2001-095-03001-0).

Keywords

  • Cassie state
  • Contact angle
  • Contact angle hysteresis
  • Double roughness
  • Micro roughness
  • Nano roughness
  • Super hydrophobic surface
  • Wenzel state

ASJC Scopus subject areas

  • Chemical Engineering (miscellaneous)
  • Bioengineering

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