Fabricating semiconductor nano/microwires and transfer printing ordered arrays of them onto plastic substrates

Yugang Sun, John A. Rogers*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

157 Scopus citations

Abstract

Ordered arrays of single-crystalline nano- and microwires of GaAs and InP with well-controlled lengths, widths, and cross-sectional shapes have been fabricated over large areas from high quality bulk wafers by the use of traditional photolithography and anisotropic, chemical wet etching. A printing technique using elastomeric stamps can transfer these wire arrays to plastic substrates, with excellent retention of order and crystallographic orientation of the wires. Electrical measurements on simple test structures demonstrate the high degree of mechanical flexibility of the resulting wire arrays on plastics. The combination of "top down" wire fabrication and "dry" transfer printing might represent an effective route to ultrahigh performance macroelectronic systems.

Original languageEnglish (US)
Pages (from-to)1953-1959
Number of pages7
JournalNano letters
Volume4
Issue number10
DOIs
StatePublished - Oct 1 2004

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering

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