Abstract
Details of the fabrication and characterization of hybrid green light emitting diodes, composed of n -ZnO/(InGaN/GaN) multi-quantum-wells/ p -GaN on AlN/sapphire, are reported. Scanning electron microscope, atomic force microscopy, high resolution x-ray diffraction, and photoluminescence were used to study the hybrid device. The effects of solvents, annealing, and etching on n -ZnO are discussed. Successful hybridization of ZnO and (In)GaN into a green light emitting diode was realized.
Original language | English (US) |
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Pages (from-to) | 1784-1788 |
Number of pages | 5 |
Journal | Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics |
Volume | 27 |
Issue number | 3 |
DOIs | |
State | Published - 2009 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Process Chemistry and Technology
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering
- Materials Chemistry