Fabrication and Deformation of 3D Multilayered Kirigami Microstructures

INIS

• compression 100%
• deformation 100%
• devices 66%
• geometry 66%
• curves 66%
• silicon 66%
• buckling 66%
• scanning electron microscopy 33%
• range 33%
• fabrication 33%
• applications 33%
• recovery 33%
• failures 33%
• substrates 33%
• layers 33%
• stiffness 33%
• configuration 33%
• damage 33%
• precursor 33%
• microstructure 33%
• loading 33%
• computerized simulation 33%
• finite element method 33%
• bonding 33%
• microelectronics 33%
• epoxides 33%
• monocrystals 33%

Material Science

• Devices 66%
• Buckling 66%
• Silicon 66%
• Microdevices 33%
• Microstructure 33%
• Microelectronics 33%
• Scanning Electron Microscopy 33%
• Epoxy 33%
• Mechanical Property 33%
• Material 33%
• Finite Element Methods 33%
• Stiffness 33%
• Crystalline Material 33%