Fabrication and Mechanical Cycling of Polymer Microscale Architectures for 3D MEMS Sensors

Mohammad Humood, Joseph Lefebvre, Yan Shi, Mengdi Han, Coleman D. Fincher, Matt Pharr, John A. Rogers, Andreas A. Polycarpou*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

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Engineering

Material Science