Fabrication and structural evaluation of beaded inorganic nanostructures using soft electron-beam lithography

Suresh Donthu*, Tao Sun, Vinayak Dravid

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

19 Scopus citations

Abstract

Beaded inorganic nanostructures such as zinc oxide (ZnO) and bismuth ferrite (BFO) were fabricated and structurally evaluated using soft electron-beam lithography (soft-eBL). The technique synergistically combined the advantages of wet chemistry and eBL, enabling fabrication of solid-state nanostructures on any substrate. The ZnO and BFO samples were treated with oxygen-plasma for 20 seconds and spin-coated with a solution precursor after being being processed with soft-eBL. Oxygen-plasma treatment was necessary to remove any residual resist material in the patterned locations and to make the substrate more hydrophilic, to facilitate the flow of the liquid precursor into the patterned trenches. The precursor-coated substrate was soaked in acetone to dissolve the resist and lift-off material outside the patterns, leaving solid structures with dimensions defined during the lithography step.

Original languageEnglish (US)
Pages (from-to)125-128
Number of pages4
JournalAdvanced Materials
Volume19
Issue number1
DOIs
StatePublished - Jan 8 2007

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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