Fabrication of AlN-GaN-AlN sub-micron waveguide with cleaved facets

Vivek Krishnamurthy; Chen Yijing; Lai Yicheng; Seng Tiong Ho

Fabrication of AlN-GaN-AlN sub-micron waveguide with cleaved facets

Vivek Krishnamurthy, Chen Yijing, Lai Yicheng, Seng Tiong Ho

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Sub-micron waveguide fabrication in AlN-GaN-AlN is demonstrated. Improvement to sidewall verticality and reduced nanorod defects through optimized etching parameters are highlighted. Dice-and-cleave approach is adopted to achieve good end-facets.

Original language	English (US)
Title of host publication	Frontiers in Optics, FiO 2011
State	Published - Dec 1 2011
Event	Frontiers in Optics, FiO 2011 - San Jose, CA, United States Duration: Oct 16 2011 → Oct 20 2011

Publication series

Name	Optics InfoBase Conference Papers
ISSN (Electronic)	2162-2701

Other

Other	Frontiers in Optics, FiO 2011
Country/Territory	United States
City	San Jose, CA
Period	10/16/11 → 10/20/11

ASJC Scopus subject areas

Instrumentation
Atomic and Molecular Physics, and Optics

Cite this

@inproceedings{b236a94ccef840fe9c5fb93c29fc3a9f,

title = "Fabrication of AlN-GaN-AlN sub-micron waveguide with cleaved facets",

abstract = "Sub-micron waveguide fabrication in AlN-GaN-AlN is demonstrated. Improvement to sidewall verticality and reduced nanorod defects through optimized etching parameters are highlighted. Dice-and-cleave approach is adopted to achieve good end-facets.",

author = "Vivek Krishnamurthy and Chen Yijing and Lai Yicheng and Ho, {Seng Tiong}",

year = "2011",

month = dec,

day = "1",

language = "English (US)",

isbn = "9781557529176",

series = "Optics InfoBase Conference Papers",

booktitle = "Frontiers in Optics, FiO 2011",

note = "Frontiers in Optics, FiO 2011 ; Conference date: 16-10-2011 Through 20-10-2011",

}

TY - GEN

T1 - Fabrication of AlN-GaN-AlN sub-micron waveguide with cleaved facets

AU - Krishnamurthy, Vivek

AU - Yijing, Chen

AU - Yicheng, Lai

AU - Ho, Seng Tiong

PY - 2011/12/1

Y1 - 2011/12/1

N2 - Sub-micron waveguide fabrication in AlN-GaN-AlN is demonstrated. Improvement to sidewall verticality and reduced nanorod defects through optimized etching parameters are highlighted. Dice-and-cleave approach is adopted to achieve good end-facets.

AB - Sub-micron waveguide fabrication in AlN-GaN-AlN is demonstrated. Improvement to sidewall verticality and reduced nanorod defects through optimized etching parameters are highlighted. Dice-and-cleave approach is adopted to achieve good end-facets.

UR - http://www.scopus.com/inward/record.url?scp=84893582903&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84893582903&partnerID=8YFLogxK

M3 - Conference contribution

SN - 9781557529176

T3 - Optics InfoBase Conference Papers

BT - Frontiers in Optics, FiO 2011

T2 - Frontiers in Optics, FiO 2011

Y2 - 16 October 2011 through 20 October 2011

ER -

Fabrication of AlN-GaN-AlN sub-micron waveguide with cleaved facets

Abstract

Publication series

Other

ASJC Scopus subject areas

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