Fabrication of AlN-GaN-AlN sub-micron waveguide with cleaved facets

Vivek Krishnamurthy, Chen Yijing, Lai Yicheng, Seng Tiong Ho

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Sub-micron waveguide fabrication in AlN-GaN-AlN is demonstrated. Improvement to sidewall verticality and reduced nanorod defects through optimized etching parameters are highlighted. Dice-and-cleave approach is adopted to achieve good end-facets.

Original languageEnglish (US)
Title of host publicationFrontiers in Optics, FiO 2011
StatePublished - Dec 1 2011
EventFrontiers in Optics, FiO 2011 - San Jose, CA, United States
Duration: Oct 16 2011Oct 20 2011

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701


OtherFrontiers in Optics, FiO 2011
CountryUnited States
CitySan Jose, CA

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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