Fabrication of AlxGa1-xP waveguides with unusually smooth side walls for nonlinear optical applications

S. Wu*, W. G. Bi, R. P. Espindola, M. K. Udo, C. W. Tu, S. T. Ho

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A waveguide with AlxGa1-xP material is fabricated and investigated for its potential use as a nonlinear optical material. The wafer surface of the material is etched down to form rib waveguides using the etchant HNO3:2HCL:2H2O. SEM cross-sectional profiles of the rib waveguides reveal two orientations giving different profiles, suiting the requirements for waveguide applications. Most importantly, the HNO3:2HCL:2H2O proves to be a very good etchant, giving unusually smoother side walls when compared to typical AlGaAs waveguides. An experiment currently performed to measure the optical nonlinearities of the AlxGa1-xP waveguides is described.

Original languageEnglish (US)
Title of host publicationConference Proceedings - Lasers and Electro-Optics Society Annual Meeting
PublisherPubl by IEEE
Pages335-336
Number of pages2
ISBN (Print)0780319710
StatePublished - 1994
EventProceedings of the Conference on Lasers and Electro-Optics - Anaheim, CA, USA
Duration: May 8 1994May 13 1994

Publication series

NameConference Proceedings - Lasers and Electro-Optics Society Annual Meeting
Volume8

Other

OtherProceedings of the Conference on Lasers and Electro-Optics
CityAnaheim, CA, USA
Period5/8/945/13/94

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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