Fabrication of AlxGa1-xP waveguides with unusually smooth side walls for nonlinear optical applications

S. Wu; W. G. Bi; R. P. Espindola; M. K. Udo; C. W. Tu; S. T. Ho

Fabrication of Al_xGa_1-xP waveguides with unusually smooth side walls for nonlinear optical applications

S. Wu^*, W. G. Bi, R. P. Espindola, M. K. Udo, C. W. Tu, S. T. Ho

^*Corresponding author for this work

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A waveguide with Al_xGa_1-xP material is fabricated and investigated for its potential use as a nonlinear optical material. The wafer surface of the material is etched down to form rib waveguides using the etchant HNO₃:2HCL:2H₂O. SEM cross-sectional profiles of the rib waveguides reveal two orientations giving different profiles, suiting the requirements for waveguide applications. Most importantly, the HNO₃:2HCL:2H₂O proves to be a very good etchant, giving unusually smoother side walls when compared to typical AlGaAs waveguides. An experiment currently performed to measure the optical nonlinearities of the Al_xGa_1-xP waveguides is described.

Original language	English (US)
Title of host publication	Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting
Publisher	Publ by IEEE
Pages	335-336
Number of pages	2
ISBN (Print)	0780319710
State	Published - 1994
Event	Proceedings of the Conference on Lasers and Electro-Optics - Anaheim, CA, USA Duration: May 8 1994 → May 13 1994

Publication series

Name	Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting
Volume	8

Other

Other	Proceedings of the Conference on Lasers and Electro-Optics
City	Anaheim, CA, USA
Period	5/8/94 → 5/13/94

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Cite this

Wu, S., Bi, W. G., Espindola, R. P., Udo, M. K., Tu, C. W., & Ho, S. T. (1994). Fabrication of Al_xGa_1-xP waveguides with unusually smooth side walls for nonlinear optical applications. In Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting (pp. 335-336). (Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting; Vol. 8). Publ by IEEE.

@inproceedings{08a919d58a2c43bfadb92db18d9ddd24,

title = "Fabrication of AlxGa1-xP waveguides with unusually smooth side walls for nonlinear optical applications",

abstract = "A waveguide with AlxGa1-xP material is fabricated and investigated for its potential use as a nonlinear optical material. The wafer surface of the material is etched down to form rib waveguides using the etchant HNO3:2HCL:2H2O. SEM cross-sectional profiles of the rib waveguides reveal two orientations giving different profiles, suiting the requirements for waveguide applications. Most importantly, the HNO3:2HCL:2H2O proves to be a very good etchant, giving unusually smoother side walls when compared to typical AlGaAs waveguides. An experiment currently performed to measure the optical nonlinearities of the AlxGa1-xP waveguides is described.",

author = "S. Wu and Bi, {W. G.} and Espindola, {R. P.} and Udo, {M. K.} and Tu, {C. W.} and Ho, {S. T.}",

year = "1994",

language = "English (US)",

isbn = "0780319710",

series = "Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting",

publisher = "Publ by IEEE",

pages = "335--336",

booktitle = "Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting",

}

Wu, S, Bi, WG, Espindola, RP, Udo, MK, Tu, CW & Ho, ST 1994, Fabrication of Al_xGa_1-xP waveguides with unusually smooth side walls for nonlinear optical applications. in Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting. Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting, vol. 8, Publ by IEEE, pp. 335-336, Proceedings of the Conference on Lasers and Electro-Optics, Anaheim, CA, USA, 5/8/94.

Fabrication of Al_xGa_1-xP waveguides with unusually smooth side walls for nonlinear optical applications. / Wu, S.; Bi, W. G.; Espindola, R. P. et al.
Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting. Publ by IEEE, 1994. p. 335-336 (Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting; Vol. 8).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Fabrication of AlxGa1-xP waveguides with unusually smooth side walls for nonlinear optical applications

AU - Wu, S.

AU - Bi, W. G.

AU - Espindola, R. P.

AU - Udo, M. K.

AU - Tu, C. W.

AU - Ho, S. T.

PY - 1994

Y1 - 1994

N2 - A waveguide with AlxGa1-xP material is fabricated and investigated for its potential use as a nonlinear optical material. The wafer surface of the material is etched down to form rib waveguides using the etchant HNO3:2HCL:2H2O. SEM cross-sectional profiles of the rib waveguides reveal two orientations giving different profiles, suiting the requirements for waveguide applications. Most importantly, the HNO3:2HCL:2H2O proves to be a very good etchant, giving unusually smoother side walls when compared to typical AlGaAs waveguides. An experiment currently performed to measure the optical nonlinearities of the AlxGa1-xP waveguides is described.

AB - A waveguide with AlxGa1-xP material is fabricated and investigated for its potential use as a nonlinear optical material. The wafer surface of the material is etched down to form rib waveguides using the etchant HNO3:2HCL:2H2O. SEM cross-sectional profiles of the rib waveguides reveal two orientations giving different profiles, suiting the requirements for waveguide applications. Most importantly, the HNO3:2HCL:2H2O proves to be a very good etchant, giving unusually smoother side walls when compared to typical AlGaAs waveguides. An experiment currently performed to measure the optical nonlinearities of the AlxGa1-xP waveguides is described.

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BT - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting

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T2 - Proceedings of the Conference on Lasers and Electro-Optics

Y2 - 8 May 1994 through 13 May 1994

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