Fabrication of carbon nanofibrous microelectrode array (CNF-MEA) using nanofiber immersion photolithography

Pit Fee Jao; Eric Franca; Sheng Po Fang; Junghae Yoon; Kun Cho; E. David; Gloria Kim; Bruce Wheeler; Yong Kyu Yoon

doi:10.1109/MEMSYS.2014.6765686

Fabrication of carbon nanofibrous microelectrode array (CNF-MEA) using nanofiber immersion photolithography

Pit Fee Jao, Eric Franca, Sheng Po Fang, Junghae Yoon, Kun Cho, E. David, Gloria Kim, Bruce Wheeler, Yong Kyu Yoon

Biomedical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

6 Scopus citations

Abstract

Microelectrode arrays (MEAs) are widely used for stimulating and receiving electrical signals between human and machines and for in vitro neural study. This work demonstrates the fabrication process of nanofibrous 3D microelectrodes using immersion lithography. Oil immersion negates the diffraction effects intrinsic in the photopatterning of electrospun nanofibers to give increased aspect ratio microarchitectures. Nanofiber electrode resistivity is characterized and its performance compared to that of carbon thin film. In vitro testing of electrodes are performed using E18 cortical neurons and analyzed for cell density and cell viability.

Original language	English (US)
Title of host publication	MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	498-501
Number of pages	4
ISBN (Print)	9781479935086
DOIs	https://doi.org/10.1109/MEMSYS.2014.6765686
State	Published - 2014
Event	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States Duration: Jan 26 2014 → Jan 30 2014

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Country/Territory	United States
City	San Francisco, CA
Period	1/26/14 → 1/30/14

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/MEMSYS.2014.6765686

Cite this

Jao, P. F., Franca, E., Fang, S. P., Yoon, J., Cho, K., David, E., Kim, G., Wheeler, B., & Yoon, Y. K. (2014). Fabrication of carbon nanofibrous microelectrode array (CNF-MEA) using nanofiber immersion photolithography. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems (pp. 498-501). Article 6765686 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2014.6765686

Jao, Pit Fee ; Franca, Eric ; Fang, Sheng Po et al. / Fabrication of carbon nanofibrous microelectrode array (CNF-MEA) using nanofiber immersion photolithography. MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 498-501 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{4ba1d8a75a174dc2abfe347515c42715,

title = "Fabrication of carbon nanofibrous microelectrode array (CNF-MEA) using nanofiber immersion photolithography",

abstract = "Microelectrode arrays (MEAs) are widely used for stimulating and receiving electrical signals between human and machines and for in vitro neural study. This work demonstrates the fabrication process of nanofibrous 3D microelectrodes using immersion lithography. Oil immersion negates the diffraction effects intrinsic in the photopatterning of electrospun nanofibers to give increased aspect ratio microarchitectures. Nanofiber electrode resistivity is characterized and its performance compared to that of carbon thin film. In vitro testing of electrodes are performed using E18 cortical neurons and analyzed for cell density and cell viability.",

author = "Jao, {Pit Fee} and Eric Franca and Fang, {Sheng Po} and Junghae Yoon and Kun Cho and E. David and Gloria Kim and Bruce Wheeler and Yoon, {Yong Kyu}",

year = "2014",

doi = "10.1109/MEMSYS.2014.6765686",

language = "English (US)",

isbn = "9781479935086",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "498--501",

booktitle = "MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems",

address = "United States",

note = "27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 ; Conference date: 26-01-2014 Through 30-01-2014",

}

Jao, PF, Franca, E, Fang, SP, Yoon, J, Cho, K, David, E, Kim, G, Wheeler, B & Yoon, YK 2014, Fabrication of carbon nanofibrous microelectrode array (CNF-MEA) using nanofiber immersion photolithography. in MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems., 6765686, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 498-501, 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, San Francisco, CA, United States, 1/26/14. https://doi.org/10.1109/MEMSYS.2014.6765686

Fabrication of carbon nanofibrous microelectrode array (CNF-MEA) using nanofiber immersion photolithography. / Jao, Pit Fee; Franca, Eric; Fang, Sheng Po et al.
MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. p. 498-501 6765686 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Fabrication of carbon nanofibrous microelectrode array (CNF-MEA) using nanofiber immersion photolithography

AU - Jao, Pit Fee

AU - Franca, Eric

AU - Fang, Sheng Po

AU - Yoon, Junghae

AU - Cho, Kun

AU - David, E.

AU - Kim, Gloria

AU - Wheeler, Bruce

AU - Yoon, Yong Kyu

PY - 2014

Y1 - 2014

N2 - Microelectrode arrays (MEAs) are widely used for stimulating and receiving electrical signals between human and machines and for in vitro neural study. This work demonstrates the fabrication process of nanofibrous 3D microelectrodes using immersion lithography. Oil immersion negates the diffraction effects intrinsic in the photopatterning of electrospun nanofibers to give increased aspect ratio microarchitectures. Nanofiber electrode resistivity is characterized and its performance compared to that of carbon thin film. In vitro testing of electrodes are performed using E18 cortical neurons and analyzed for cell density and cell viability.

AB - Microelectrode arrays (MEAs) are widely used for stimulating and receiving electrical signals between human and machines and for in vitro neural study. This work demonstrates the fabrication process of nanofibrous 3D microelectrodes using immersion lithography. Oil immersion negates the diffraction effects intrinsic in the photopatterning of electrospun nanofibers to give increased aspect ratio microarchitectures. Nanofiber electrode resistivity is characterized and its performance compared to that of carbon thin film. In vitro testing of electrodes are performed using E18 cortical neurons and analyzed for cell density and cell viability.

UR - http://www.scopus.com/inward/record.url?scp=84898986904&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84898986904&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2014.6765686

DO - 10.1109/MEMSYS.2014.6765686

M3 - Conference contribution

AN - SCOPUS:84898986904

SN - 9781479935086

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 498

EP - 501

BT - MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014

Y2 - 26 January 2014 through 30 January 2014

ER -

Jao PF, Franca E, Fang SP, Yoon J, Cho K, David E et al. Fabrication of carbon nanofibrous microelectrode array (CNF-MEA) using nanofiber immersion photolithography. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2014. p. 498-501. 6765686. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2014.6765686

Fabrication of carbon nanofibrous microelectrode array (CNF-MEA) using nanofiber immersion photolithography

Abstract

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ASJC Scopus subject areas

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