Fabrication of carbon nanofibrous microelectrode array (CNF-MEA) using nanofiber immersion photolithography

Pit Fee Jao, Eric Franca, Sheng Po Fang, Junghae Yoon, Kun Cho, E. David, Gloria Kim, Bruce Wheeler, Yong Kyu Yoon

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations

Abstract

Microelectrode arrays (MEAs) are widely used for stimulating and receiving electrical signals between human and machines and for in vitro neural study. This work demonstrates the fabrication process of nanofibrous 3D microelectrodes using immersion lithography. Oil immersion negates the diffraction effects intrinsic in the photopatterning of electrospun nanofibers to give increased aspect ratio microarchitectures. Nanofiber electrode resistivity is characterized and its performance compared to that of carbon thin film. In vitro testing of electrodes are performed using E18 cortical neurons and analyzed for cell density and cell viability.

Original languageEnglish (US)
Title of host publicationMEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages498-501
Number of pages4
ISBN (Print)9781479935086
DOIs
StatePublished - 2014
Event27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States
Duration: Jan 26 2014Jan 30 2014

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
CountryUnited States
CitySan Francisco, CA
Period1/26/141/30/14

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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