Fabrication of metallic magnetic calorimeter X-ray detector arrays

Wen Ting Hsieh*, J. A. Adams, S. R. Bandler, J. Beyer, K. L. Denis, H. Eguchi, E. Figueroa-Feliciano, H. Rotzinger, G. H. Schneider, G. M. Seidel, T. R. Stevenson, D. E. Travers

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

19 Scopus citations


Microcalorimeters with metallic magnetic sensors show great promise for use in astronomical X-ray spectroscopy. We describe the design and fabrication of a lithographically patterned magnetic microcalorimeter. A paramagnetic AuEr film is sputter-deposited as the sensor, which is coupled to a low noise SQUID via a meander superconducting pickup loop used as an inductor. This inductor also provides the magnetic field bias to the sensor. The AuEr film is deposited over this meander such that the field created by a large current flowing in the loop magnetizes the sensor material. The use of thin film techniques in the fabrication of these magnetic sensors not only allows strong magnetic coupling between the sensor and the inductor, it also is scalable for array fabrication.

Original languageEnglish (US)
Pages (from-to)357-362
Number of pages6
JournalJournal of Low Temperature Physics
Issue number1-2 PART 1
StatePublished - Apr 2008


  • AuEr film
  • Magnetic calorimeter
  • X-ray detector

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • General Materials Science
  • Condensed Matter Physics


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