Fabrication of Mo/Au transition-edge sensors for X-ray spectrometry

Nilesh Tralshawala*, Regis P. Brekosky, Mary J. Li, Enectali Figueroa-Feliciano, Fred M. Finkbeiner, Mark A. Lindeman, Carl M. Stahle, Caroline K. Stahle

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

16 Scopus citations


We present fabrication details of our Mo/Au x-ray microcalorimeters, which are being developed as one of the candidate high resolution spectrometers for the Constellation-X mission. We have reproducibly fabricated Mo/Au transition-edge sensors with Tc's of ∼ 100 mK on etched silicon nitride membranes and connected via superconducting Nb leads. Our single pixel devices have, so far, attained resolution of 3.7 eV at 3.3 keV. We also discuss our plans for fabrication and testing of fully functional multi-pixel array of x-ray microcalorimeters.

Original languageEnglish (US)
Pages (from-to)755-758
Number of pages4
JournalIEEE Transactions on Applied Superconductivity
Issue number1 I
StatePublished - Mar 2001
Event2000 Applied Superconductivity Conference - Virginia Beach, VA, United States
Duration: Sep 17 2000Sep 22 2000


  • Microcalorimeter
  • Proximity effect
  • Superconducting transition edge sensors

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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