Fabrication of Mo/Au transition-edge sensors for X-ray spectrometry

Nilesh Tralshawala; Regis P. Brekosky; Mary J. Li; Enectali Figueroa-Feliciano; Fred M. Finkbeiner; Mark A. Lindeman; Carl M. Stahle; Caroline K. Stahle

doi:10.1109/77.919455

Fabrication of Mo/Au transition-edge sensors for X-ray spectrometry

Nilesh Tralshawala^*, Regis P. Brekosky, Mary J. Li, Enectali Figueroa-Feliciano, Fred M. Finkbeiner, Mark A. Lindeman, Carl M. Stahle, Caroline K. Stahle

^*Corresponding author for this work

Physics and Astronomy

Research output: Contribution to journal › Conference article › peer-review

16 Scopus citations

Abstract

We present fabrication details of our Mo/Au x-ray microcalorimeters, which are being developed as one of the candidate high resolution spectrometers for the Constellation-X mission. We have reproducibly fabricated Mo/Au transition-edge sensors with Tc's of ∼ 100 mK on etched silicon nitride membranes and connected via superconducting Nb leads. Our single pixel devices have, so far, attained resolution of 3.7 eV at 3.3 keV. We also discuss our plans for fabrication and testing of fully functional multi-pixel array of x-ray microcalorimeters.

Original language	English (US)
Pages (from-to)	755-758
Number of pages	4
Journal	IEEE Transactions on Applied Superconductivity
Volume	11
Issue number	1 I
DOIs	https://doi.org/10.1109/77.919455
State	Published - 2001
Event	2000 Applied Superconductivity Conference - Virginia Beach, VA, United States Duration: Sep 17 2000 → Sep 22 2000

Keywords

Microcalorimeter
Proximity effect
Superconducting transition edge sensors

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering

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10.1109/77.919455

Cite this

@article{67d9bebb5f584b8b938744e3f09690f4,

title = "Fabrication of Mo/Au transition-edge sensors for X-ray spectrometry",

abstract = "We present fabrication details of our Mo/Au x-ray microcalorimeters, which are being developed as one of the candidate high resolution spectrometers for the Constellation-X mission. We have reproducibly fabricated Mo/Au transition-edge sensors with Tc's of ∼ 100 mK on etched silicon nitride membranes and connected via superconducting Nb leads. Our single pixel devices have, so far, attained resolution of 3.7 eV at 3.3 keV. We also discuss our plans for fabrication and testing of fully functional multi-pixel array of x-ray microcalorimeters.",

keywords = "Microcalorimeter, Proximity effect, Superconducting transition edge sensors",

author = "Nilesh Tralshawala and Brekosky, {Regis P.} and Li, {Mary J.} and Enectali Figueroa-Feliciano and Finkbeiner, {Fred M.} and Lindeman, {Mark A.} and Stahle, {Carl M.} and Stahle, {Caroline K.}",

year = "2001",

doi = "10.1109/77.919455",

language = "English (US)",

volume = "11",

pages = "755--758",

journal = "IEEE Transactions on Applied Superconductivity",

issn = "1051-8223",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "1 I",

note = "2000 Applied Superconductivity Conference ; Conference date: 17-09-2000 Through 22-09-2000",

}

TY - JOUR

T1 - Fabrication of Mo/Au transition-edge sensors for X-ray spectrometry

AU - Tralshawala, Nilesh

AU - Brekosky, Regis P.

AU - Li, Mary J.

AU - Figueroa-Feliciano, Enectali

AU - Finkbeiner, Fred M.

AU - Lindeman, Mark A.

AU - Stahle, Carl M.

AU - Stahle, Caroline K.

PY - 2001

Y1 - 2001

N2 - We present fabrication details of our Mo/Au x-ray microcalorimeters, which are being developed as one of the candidate high resolution spectrometers for the Constellation-X mission. We have reproducibly fabricated Mo/Au transition-edge sensors with Tc's of ∼ 100 mK on etched silicon nitride membranes and connected via superconducting Nb leads. Our single pixel devices have, so far, attained resolution of 3.7 eV at 3.3 keV. We also discuss our plans for fabrication and testing of fully functional multi-pixel array of x-ray microcalorimeters.

AB - We present fabrication details of our Mo/Au x-ray microcalorimeters, which are being developed as one of the candidate high resolution spectrometers for the Constellation-X mission. We have reproducibly fabricated Mo/Au transition-edge sensors with Tc's of ∼ 100 mK on etched silicon nitride membranes and connected via superconducting Nb leads. Our single pixel devices have, so far, attained resolution of 3.7 eV at 3.3 keV. We also discuss our plans for fabrication and testing of fully functional multi-pixel array of x-ray microcalorimeters.

KW - Microcalorimeter

KW - Proximity effect

KW - Superconducting transition edge sensors

UR - http://www.scopus.com/inward/record.url?scp=0035269120&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0035269120&partnerID=8YFLogxK

U2 - 10.1109/77.919455

DO - 10.1109/77.919455

M3 - Conference article

AN - SCOPUS:0035269120

SN - 1051-8223

VL - 11

SP - 755

EP - 758

JO - IEEE Transactions on Applied Superconductivity

JF - IEEE Transactions on Applied Superconductivity

IS - 1 I

T2 - 2000 Applied Superconductivity Conference

Y2 - 17 September 2000 through 22 September 2000

ER -

Fabrication of Mo/Au transition-edge sensors for X-ray spectrometry

Abstract

Keywords

ASJC Scopus subject areas

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