Multilayers consisting of superconducting niobium nitride alternated with layers of insulating aluminum nitride have been fabricated using dc magnetron reactive sputtering. Under the proper conditions NbN can be produced in a (111) orientation and AlN in a (0001) orientation with an in-plane lattice mismatch of only 0.27%. Proper preparation of the aluminum target was necessary to ensure uniform deposition. X-ray diffraction and transmission electron microscopy verify the layered nature of these samples. Transport properties are studied as they relate to the structure of the system.
ASJC Scopus subject areas
- Physics and Astronomy(all)