We demonstrate the formation, in a single process step, of periodic arrays of features of surface relief with submicrometer lateral dimensions in hybrid organic and inorganic solgel glasses by using elastomeric molding techniques. Lasers formed with molded photonic crystal resonators that consist of triangular, square, and honeycomb lattices of cylindrical posts and holes show emission spectra and lasing thresholds that are similar to devices formed by conventional high-resolution photolithographic patterning of thick layers of thermally grown oxide.
|Original language||English (US)|
|Number of pages||4|
|State||Published - Sep 20 1999|
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- Engineering (miscellaneous)
- Electrical and Electronic Engineering