Fabrication of three-dimensional microstructures based on singled-layered SU-8 for lab-on-chip applications

Hui Yu, Oluwaseyi Balogun, Biao Li, T. W. Murray, Xin Zhang*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

27 Scopus citations


This paper introduces a novel 3D manufacturing approach to the rapid processing of microfluidic components such as embedded channels and microvalves, using a scanning laser system. Compared to existing manufacturing techniques, our direct UV laser writing method greatly simplifies fabrication processes, potentially reducing the design-to-fabrication time to a few hours, which is extremely beneficial during the product development stages. The initial process validation has been presented by using SU-8 material. With the fine-tuning of the laser processing parameters, the depth of SU-8 polymerization can be controlled. This paper also describes the underlying theory and method to determine the Young's modulus of the exposed SU-8 material by using a laser acoustic microscopy system. The laser-based ultrasonic technique offers a non-contact, nondestructive means of evaluation and materials characterization. More importantly, it allows for local inspection of material properties. The results presented in this paper potentially could serve as the first crucial step towards the rapid manufacturing of microdevices for lab-on-chip applications.

Original languageEnglish (US)
Pages (from-to)228-234
Number of pages7
JournalSensors and Actuators, A: Physical
Issue number2
StatePublished - Mar 13 2006


  • 3D microstructure
  • Lab-on-chip
  • Laser ultrasonics
  • Single-layered SU-8

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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