Fabrication of transition edge sensor X-ray microcalorimeters for Constellation-X

J. A. Chervenak*, F. M. Finkbeiner, T. R. Stevenson, D. J. Talley, R. P. Brekosky, S. R. Bandler, E. Figueroa-Feliciano, M. A. Lindeman, R. L. Kelley, T. Saab, C. K. Stahle

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

23 Scopus citations

Abstract

NASA's Constellation-X (Con-X) mission is a driver for advancing low-temperature detector technologies, requiring 1000-pixel two-dimensional arrays with >95% filling fraction and quantum efficiency at 6keV and better than 4eV energy resolution for 1-10keV photons. We describe a robust transition edge sensor fabrication process that can produce detector arrays with integrated absorbers approaching the specifications of Con-X. We address issues such as the methods of superconducting bilayer deposition, detector geometry definition, and absorber interface.

Original languageEnglish (US)
Pages (from-to)460-462
Number of pages3
JournalNuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Volume520
Issue number1-3
DOIs
StatePublished - Mar 11 2004

Keywords

  • Bilayer
  • Transition edge sensor
  • X-ray detector

ASJC Scopus subject areas

  • Instrumentation
  • Nuclear and High Energy Physics

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