Abstract
NASA's Constellation-X (Con-X) mission is a driver for advancing low-temperature detector technologies, requiring 1000-pixel two-dimensional arrays with >95% filling fraction and quantum efficiency at 6keV and better than 4eV energy resolution for 1-10keV photons. We describe a robust transition edge sensor fabrication process that can produce detector arrays with integrated absorbers approaching the specifications of Con-X. We address issues such as the methods of superconducting bilayer deposition, detector geometry definition, and absorber interface.
Original language | English (US) |
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Pages (from-to) | 460-462 |
Number of pages | 3 |
Journal | Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment |
Volume | 520 |
Issue number | 1-3 |
DOIs | |
State | Published - Mar 11 2004 |
Keywords
- Bilayer
- Transition edge sensor
- X-ray detector
ASJC Scopus subject areas
- Nuclear and High Energy Physics
- Instrumentation