Abstract
Metalorganic vapor-phase epitaxy (MOVPE) is being developed for growth of ferroelectric oxide films for electro-optic and nonlinear optical applications. With this technique, epitaxial BaTiO3 optical waveguides and electro-optic modulators have been fabricated. MOVPE is expected to be a promising technique for the fabrication of a wide variety of thin film electro-optic and nonlinear optical devices and for their integration.
Original language | English (US) |
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Pages (from-to) | 706-710 |
Number of pages | 5 |
Journal | Journal of Crystal Growth |
Volume | 195 |
Issue number | 1-4 |
DOIs | |
State | Published - Dec 15 1998 |
Keywords
- BaTiO
- Ferroelectric oxide films
- MOVPE
ASJC Scopus subject areas
- Condensed Matter Physics
- Inorganic Chemistry
- Materials Chemistry