Abstract
Metalorganic vapor-phase epitaxy (MOVPE) is being developed for growth of ferroelectric oxide films for electro-optic and nonlinear optical applications. With this technique, epitaxial BaTiO3 optical waveguides and electro-optic modulators have been fabricated. MOVPE is expected to be a promising technique for the fabrication of a wide variety of thin film electro-optic and nonlinear optical devices and for their integration.
Original language | English (US) |
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Pages (from-to) | 706-710 |
Number of pages | 5 |
Journal | Journal of Crystal Growth |
Volume | 195 |
Issue number | 1-4 |
DOIs | |
State | Published - Dec 15 1998 |
Funding
This work was carried out in part by members of Electroceramic thin film group of the MRSEC at Northwestern University. MOCVD studies have benefited from support by the DOE Materials Science program. Ferroelectric electro-optic thin film studies are supported by AFOSR/DARPA through the MURI program.
Keywords
- BaTiO
- Ferroelectric oxide films
- MOVPE
ASJC Scopus subject areas
- Condensed Matter Physics
- Inorganic Chemistry
- Materials Chemistry