@inproceedings{f2c0505ac1a34146b7dd857590487fa6,
title = "Flexure-based microscope objective",
abstract = "Continuous reduction of feature dimensions in modern computer chips increases the challenge of measuring them. The state-of-the-art technology for imaging and fault isolation in integrated circuits (ICs) is done from the backside and uses a solid immersion lens (SIL) that sits directly on the back of the substrate to be imaged. A SIL can drastically increase the Numerical Aperture (NA) of the system and values of 3.5 are possible in silicon ICs. The physical placement of the lens requires high precision and good optical contact with no more than a 5nm gap under any portion of the lens. Commercial failure analysis systems require integration of the SIL with an objective system. This paper discusses the design of an integrated objective for imaging with an aplanatic SIL (aSIL).",
author = "Stockbridge, {Christopher R.} and K{\"o}kl{\"u}, {Fatih H.} and Euan Ramsay and Yang Lu and {\"U}nl{\"u}, {M. Selim} and Goldberg, {Bennett B.} and Bifano, {Thomas G.}",
year = "2012",
language = "English (US)",
isbn = "9781887706605",
series = "Proceedings - ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics Supporting the Semiconductor Industry",
pages = "105--108",
booktitle = "Proceedings - ASPE 2012 Summer Topical Meeting",
note = "ASPE 2012 Summer Topical Meeting on Precision Engineering and Mechatronics Suporting the Semiconductor Industry ; Conference date: 24-06-2012 Through 26-06-2012",
}