Focused ion-beam milling with a sub-10 nm diameter beam of gallium ions has been used to fabricate field-ion specimens from a multilayer film nanostructure containing 100 repetitions of a (Cu2 nm/Co2 nm) bilayer deposited directly onto a planar substrate. Successful field-ion specimen preparation has allowed the observation of these layers on the atomic scale by both field-ion imaging and atom probe compositional analysis.
ASJC Scopus subject areas
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering