Focused ion-beam specimen preparation for atom probe field-ion microscopy characterization of multilayer film structures

D. J. Larson; D. T. Foord; A. K. Petford-Long; A. Cerezo; G. D W Smith

doi:10.1088/0957-4484/10/1/010

Focused ion-beam specimen preparation for atom probe field-ion microscopy characterization of multilayer film structures

D. J. Larson^*, D. T. Foord, A. K. Petford-Long, A. Cerezo, G. D W Smith

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Conference article › peer-review

41 Scopus citations

Abstract

Focused ion-beam milling with a sub-10 nm diameter beam of gallium ions has been used to fabricate field-ion specimens from a multilayer film nanostructure containing 100 repetitions of a (Cu_{2 nm}/Co_{2 nm}) bilayer deposited directly onto a planar substrate. Successful field-ion specimen preparation has allowed the observation of these layers on the atomic scale by both field-ion imaging and atom probe compositional analysis.

Original language	English (US)
Pages (from-to)	45-50
Number of pages	6
Journal	Nanotechnology
Volume	10
Issue number	1
DOIs	https://doi.org/10.1088/0957-4484/10/1/010
State	Published - Mar 1999

ASJC Scopus subject areas

Bioengineering
General Chemistry
General Materials Science
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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10.1088/0957-4484/10/1/010

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title = "Focused ion-beam specimen preparation for atom probe field-ion microscopy characterization of multilayer film structures",

abstract = "Focused ion-beam milling with a sub-10 nm diameter beam of gallium ions has been used to fabricate field-ion specimens from a multilayer film nanostructure containing 100 repetitions of a (Cu2 nm/Co2 nm) bilayer deposited directly onto a planar substrate. Successful field-ion specimen preparation has allowed the observation of these layers on the atomic scale by both field-ion imaging and atom probe compositional analysis.",

author = "Larson, {D. J.} and Foord, {D. T.} and Petford-Long, {A. K.} and A. Cerezo and Smith, {G. D W}",

year = "1999",

month = mar,

doi = "10.1088/0957-4484/10/1/010",

language = "English (US)",

volume = "10",

pages = "45--50",

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T1 - Focused ion-beam specimen preparation for atom probe field-ion microscopy characterization of multilayer film structures

AU - Larson, D. J.

AU - Foord, D. T.

AU - Petford-Long, A. K.

AU - Cerezo, A.

AU - Smith, G. D W

PY - 1999/3

Y1 - 1999/3

N2 - Focused ion-beam milling with a sub-10 nm diameter beam of gallium ions has been used to fabricate field-ion specimens from a multilayer film nanostructure containing 100 repetitions of a (Cu2 nm/Co2 nm) bilayer deposited directly onto a planar substrate. Successful field-ion specimen preparation has allowed the observation of these layers on the atomic scale by both field-ion imaging and atom probe compositional analysis.

AB - Focused ion-beam milling with a sub-10 nm diameter beam of gallium ions has been used to fabricate field-ion specimens from a multilayer film nanostructure containing 100 repetitions of a (Cu2 nm/Co2 nm) bilayer deposited directly onto a planar substrate. Successful field-ion specimen preparation has allowed the observation of these layers on the atomic scale by both field-ion imaging and atom probe compositional analysis.

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U2 - 10.1088/0957-4484/10/1/010

DO - 10.1088/0957-4484/10/1/010

M3 - Conference article

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VL - 10

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EP - 50

JO - Nanotechnology

JF - Nanotechnology

IS - 1

ER -

Focused ion-beam specimen preparation for atom probe field-ion microscopy characterization of multilayer film structures

Abstract

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