Force Feedback Leveling of Tip Arrays for Nanolithography

@misc{c2392a0b189646ffa3dd6073854cfb9d,

title = "Force Feedback Leveling of Tip Arrays for Nanolithography",

author = "Chad Mirkin",

note = "filingdate: 2010-12-3 issueddate: 2014-6-3 Status: published attorneydocketnumber: 2009-185-05; 8745761",

year = "2011",

month = jul,

day = "7",

language = "English",

type = "Patent",

}

Research output: Patent

TY - PAT

T1 - Force Feedback Leveling of Tip Arrays for Nanolithography

AU - Mirkin, Chad

N1 - filingdate: 2010-12-3 issueddate: 2014-6-3 Status: published attorneydocketnumber: 2009-185-05

PY - 2011/7/7

Y1 - 2011/7/7

M3 - Patent

M1 - 8745761

ER -

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