| Original language | English |
|---|---|
| Patent number | 8745761 |
| State | Published - Jul 7 2011 |
Cite this
Mirkin, C. (2011). Force Feedback Leveling of Tip Arrays for Nanolithography. (Patent No. 8745761).
Force Feedback Leveling of Tip Arrays for Nanolithography
Chad Mirkin (Inventor)
Research output: Patent