Original language | English |
---|---|
Patent number | 8745761 |
State | Published - Jul 7 2011 |
Force Feedback Leveling of Tip Arrays for Nanolithography
Chad Mirkin (Inventor)
Research output: Patent
Chad Mirkin (Inventor)
Research output: Patent
Original language | English |
---|---|
Patent number | 8745761 |
State | Published - Jul 7 2011 |