Formation of carbon nitride with sp3-bonded carbon in CNx/ZrN superlattice coatings

M. L. Wu, M. U. Guruz, V. P. Dravid, Y. W. Chung*, S. Anders, F. L. Freire, G. Mariotto

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

21 Scopus citations


A carbon nitride phase with primarily sp3-bonded carbon is stabilized in CNx/ZrN superlattice coatings. Rutherford backscattering spectrometry measurements give a N/C atomic ratio ∼ 1.3 for the CN, layers. High-resolution transmission electron microscopy and Z-contrast imaging from the superlattice show a well-defined layer structure. Raman and near-edge x-ray absorption fine structure spectroscopy results reveal the formation of sp3-bonded carbon atoms in short-period CNx/ZrN superlattices.

Original languageEnglish (US)
Pages (from-to)2692-2694
Number of pages3
JournalApplied Physics Letters
Issue number19
StatePublished - May 8 2000

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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