Formation of polyhedral voids at surface cusps during growth of epitaxial TiN/NbN superlattice and alloy films

Engineering

• Substrate Interface 100%
• Bulk Diffusion 100%
• Thin Film Growth 100%
• Equilibrium Shape 100%
• Strain Relaxation 100%
• Layer Structure 100%
• Void Growth 100%
• Coherency Strain 100%
• Thin Films 100%
• Defect Structure 100%
• Magnetron 100%
• Superlattice 100%
• Flat Surface 100%

Keyphrases

• Polyhedral 100%
• Growth Direction 100%
• Epitaxial 100%
• Cusp 100%
• Superlattice Films 100%
• Alloy Films 100%
• Flat Surface 33%
• Layered Structure 33%
• Surface Diffusion 33%
• Non-planar 33%
• Adatoms 33%
• Coherency Strain 33%
• Ultra-high Vacuum 33%
• Defected Ground Structure 33%
• Cross-sectional Transmission Electron Microscopy 33%
• Void Growth 33%
• Film-substrate Interface 33%
• Thin Film Growth 33%
• Magnetron Sputtering Deposition 33%
• Bulk Diffusion 33%
• Equilibrium Shape 33%
• Strain Relaxation 33%
• (100) Planes 33%
• Integer numbers 33%
• Self-shadowing 33%
• Void Density 33%

Material Science

• Superlattice 100%
• Film 100%
• Surface (Surface Science) 100%
• Void Growth 20%
• Thin Film Growth 20%
• Sputter Deposition 20%
• Transmission Electron Microscopy 20%
• Density 20%
• Magnesium Oxide 20%
• Thin Films 20%
• Crystal Defect 20%