FORMATION OF THIN TUNGSTEN FILAMENTS VIA LPCVD.

H. H. Busta*, J. B. Ketterson, A. D. Feinerman

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint

Dive into the research topics of 'FORMATION OF THIN TUNGSTEN FILAMENTS VIA LPCVD.'. Together they form a unique fingerprint.

Keyphrases

Engineering

Chemistry

Material Science

Physics