Fracture strength of ultrananocrystalline diamond thin films - Identification of Weibull parameters

H. D. Espinosa*, B. Peng, B. C. Prorok, N. Moldovan, O. Auciello, J. A. Carlisle, D. M. Gruen, D. C. Mancini

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

105 Scopus citations

Abstract

The fracture strength of ultrananocrystalline diamond (UNCD) thin films was investigated. The fracture strength which followed a Weibull distribution was presented by the data. It was found that the Weibull parameters were highly dependent on the seeding process used in the growth of the films.

Original languageEnglish (US)
Pages (from-to)6076-6084
Number of pages9
JournalJournal of Applied Physics
Volume94
Issue number9
DOIs
StatePublished - Nov 1 2003
Externally publishedYes

ASJC Scopus subject areas

  • General Physics and Astronomy

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