Frequency tunable near-infrared metamaterials based on V02 phase transition

Matthew J. Dicken, Koray Aydin, Imogen M. Pryce, Luke A. Sweatlock, Elizabeth M. Boyd, Sameer Walavalkar, James Ma, Harry A. Atwater

Research output: Contribution to journalArticlepeer-review

461 Scopus citations


Engineering metamaterials with tunable resonances from mid- infrared to near-infrared wavelengths could have far-reaching consequences for chip based optical devices, active filters, modulators, and sensors. Utilizing the metal-insulator phase transition in vanadium oxide (V02), we demonstrate frequency-tunable metamaterials in the near-IR range, from 1.5 - 5 microns. Arrays of Ag split ring resonators (SRRs) are patterned with e- beam lithography onto planar VO2 and etched via reactive ion etching to yield Ag/VO2 hybrid SRRs. FTIR reflection data and FDTD simulation results show the resonant peak position red shifts upon heating above the phase transition temperature. We also show that, by including coupling elements in the design of these hybrid Ag/VO2 bi-layer structures, we can achieve resonant peak position tuning of up to 110 nm.

Original languageEnglish (US)
Pages (from-to)18330-18339
Number of pages10
JournalOptics Express
Issue number20
StatePublished - Sep 28 2009

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics


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