Abstract
We demonstrate full spatial coherence of an EUV source, which is used to perform coherent EUV imaging.
Original language | English (US) |
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Pages (from-to) | 66-68 |
Number of pages | 3 |
Journal | Springer Series in Chemical Physics |
Volume | 71 |
State | Published - May 17 2003 |
ASJC Scopus subject areas
- Physical and Theoretical Chemistry