Fully spatially coherent EUV source

Randy A. Bartels*, Sterling Backus, Ariel Paul, Henry Kapteyn, Margaret Murnane, Yanwei Liu, David Attwood, Chris Jacobsen

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

We demonstrate full spatial coherence of an EUV source, which is used to perform coherent EUV imaging.

Original languageEnglish (US)
Pages (from-to)66-68
Number of pages3
JournalSpringer Series in Chemical Physics
Volume71
StatePublished - May 17 2003

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry

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