Abstract
We report the Geiger mode operation of back-illuminated AlGaN avalanche photodiodes. The devices were fabricated on transparent AlN templates specifically for back-illumination to leverage hole-initiated multiplication. The spectral response was analyzed with a peak detection wavelength of 255 nm with an external quantum efficiency of 14% at zero bias. Low-photon detection capabilities were demonstrated in devices with areas $25~\mu \text{m} \times 25~\mu \text{m}$. Single photon detection efficiencies of 5% were achieved.
Original language | English (US) |
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Article number | 9312181 |
Journal | IEEE Journal of Quantum Electronics |
Volume | 57 |
Issue number | 2 |
DOIs | |
State | Published - Apr 2021 |
Funding
Manuscript received November 18, 2020; revised December 18, 2020; accepted December 24, 2020. Date of publication January 1, 2021; date of current version January 19, 2021. This work was supported by the Defense Advanced Research Projects Agency (DARPA). (Corresponding author: Manijeh Razeghi.) The authors are with the Center for Quantum Devices, Department of Electrical Engineering, Northwestern University, Evanston, IL 60208 USA (e-mail: [email protected]).
Keywords
- Aluminum gallium nitride
- avalanche breakdown
- p-i-n diodes
- photodetectors
- ultraviolet
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Electrical and Electronic Engineering