The authors report the Geiger-mode operation of back-illuminated GaN avalanche photodiodes. The devices were fabricated on transparent AlN templates specifically for back illumination in order to enhance hole-initiated multiplication. The spectral response in Geiger-mode operation was analyzed under low photon fluxes. Single photon detection capabilities were demonstrated in devices with areas ranging from 225 to 14063 μ m2. Single photon detection efficiency of 20% and dark count rate <10 kHz were achieved in the smallest devices.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)