GISAXS - glancing incidence small angle X-ray scattering

J. R Levine Parrill*, P. Georgopoulos, Y. W. Chung, J. B. Cohen

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

5 Scopus citations


In this method, the incident beam is totally externally reflected from a surface or substrate, followed by small-angle scattering of the refracted (evanescent) beam by the surface region. As one example, GISAXS can provide size information on islands associated with film growth. The technique is described, along with examples from studies of Au on glass, and InAs on silicon. In contrast to TEM this technique is nondestructive, can be done in situ, provides excellent sampling, does not necessarily require synchrotron radiation, and is not limited to thin or conducting substrates.

Original languageEnglish (US)
Pages (from-to)411-417
Number of pages7
JournalJournal De Physique. IV : JP
Issue number8
StatePublished - Dec 1 1993
EventProceedings of the 9th International Conference on Small Angle Scattering - Saclay, Fr
Duration: Apr 27 1993Apr 30 1993

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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