Abstract
In this method, the incident beam is totally externally reflected from a surface or substrate, followed by small-angle scattering of the refracted (evanescent) beam by the surface region. As one example, GISAXS can provide size information on islands associated with film growth. The technique is described, along with examples from studies of Au on glass, and InAs on silicon. In contrast to TEM this technique is nondestructive, can be done in situ, provides excellent sampling, does not necessarily require synchrotron radiation, and is not limited to thin or conducting substrates.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 411-417 |
| Number of pages | 7 |
| Journal | Journal De Physique. IV : JP |
| Volume | 3 |
| Issue number | 8 |
| State | Published - Dec 1 1993 |
| Event | Proceedings of the 9th International Conference on Small Angle Scattering - Saclay, Fr Duration: Apr 27 1993 → Apr 30 1993 |
ASJC Scopus subject areas
- Physics and Astronomy(all)