Glass substrate charging in flat panel display manufacturing

Robert G. Manley; Nicholas J. Smith; Nikolay Zhelev; Indrani Bhattacharyya; Dean Thelen; Elena Streltsova; Wanda Walczak; Jonathan Mis; Gabriel Agnello

doi:10.1002/sdtp.14171

Glass substrate charging in flat panel display manufacturing

Robert G. Manley^*, Nicholas J. Smith, Nikolay Zhelev, Indrani Bhattacharyya, Dean Thelen, Elena Streltsova, Wanda Walczak, Jonathan Mis, Gabriel Agnello

^*Corresponding author for this work

Physics and Astronomy

Research output: Contribution to journal › Conference article › peer-review

3 Scopus citations

Abstract

As technology in the arena of flat panel display progresses, panels are becoming larger, with higher pixel density and smaller device geometries. The glass sheets utilized in said panel fabrication processes are getting larger in area with Gen 10.5 (2940 mm × 3370 mm × 0.5 mm) sheets currently in mass production. With the increase in glass substrate size and decrease in the dimensions of devices fabricated on them, the continued trend will be towards greater sensitivity to electrostatic charge and possible failure. In this discussion, the role of glass charging in FPD manufacturing is presented, and its characterization is discussed.

Original language	English (US)
Pages (from-to)	1498-1501
Number of pages	4
Journal	Digest of Technical Papers - SID International Symposium
Volume	51
Issue number	1
DOIs	https://doi.org/10.1002/sdtp.14171
State	Published - 2020
Event	57th SID International Symposium, Seminar and Exhibition, Display Week, 2020 - Virtual, Online Duration: Aug 3 2020 → Aug 7 2020

Keywords

ESC
ESD
Electrostatic charging
Electrostatic damage
Electrostatic discharge
Fabrication
Flat panel display
Glass
TFT
Thin-film transistor

ASJC Scopus subject areas

General Engineering

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10.1002/sdtp.14171

Cite this

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title = "Glass substrate charging in flat panel display manufacturing",

abstract = "As technology in the arena of flat panel display progresses, panels are becoming larger, with higher pixel density and smaller device geometries. The glass sheets utilized in said panel fabrication processes are getting larger in area with Gen 10.5 (2940 mm × 3370 mm × 0.5 mm) sheets currently in mass production. With the increase in glass substrate size and decrease in the dimensions of devices fabricated on them, the continued trend will be towards greater sensitivity to electrostatic charge and possible failure. In this discussion, the role of glass charging in FPD manufacturing is presented, and its characterization is discussed.",

keywords = "ESC, ESD, Electrostatic charging, Electrostatic damage, Electrostatic discharge, Fabrication, Flat panel display, Glass, TFT, Thin-film transistor",

author = "Manley, {Robert G.} and Smith, {Nicholas J.} and Nikolay Zhelev and Indrani Bhattacharyya and Dean Thelen and Elena Streltsova and Wanda Walczak and Jonathan Mis and Gabriel Agnello",

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AU - Manley, Robert G.

AU - Smith, Nicholas J.

AU - Zhelev, Nikolay

AU - Bhattacharyya, Indrani

AU - Thelen, Dean

AU - Streltsova, Elena

AU - Walczak, Wanda

AU - Mis, Jonathan

AU - Agnello, Gabriel

PY - 2020

Y1 - 2020

N2 - As technology in the arena of flat panel display progresses, panels are becoming larger, with higher pixel density and smaller device geometries. The glass sheets utilized in said panel fabrication processes are getting larger in area with Gen 10.5 (2940 mm × 3370 mm × 0.5 mm) sheets currently in mass production. With the increase in glass substrate size and decrease in the dimensions of devices fabricated on them, the continued trend will be towards greater sensitivity to electrostatic charge and possible failure. In this discussion, the role of glass charging in FPD manufacturing is presented, and its characterization is discussed.

AB - As technology in the arena of flat panel display progresses, panels are becoming larger, with higher pixel density and smaller device geometries. The glass sheets utilized in said panel fabrication processes are getting larger in area with Gen 10.5 (2940 mm × 3370 mm × 0.5 mm) sheets currently in mass production. With the increase in glass substrate size and decrease in the dimensions of devices fabricated on them, the continued trend will be towards greater sensitivity to electrostatic charge and possible failure. In this discussion, the role of glass charging in FPD manufacturing is presented, and its characterization is discussed.

KW - ESC

KW - ESD

KW - Electrostatic charging

KW - Electrostatic damage

KW - Electrostatic discharge

KW - Fabrication

KW - Flat panel display

KW - Glass

KW - TFT

KW - Thin-film transistor

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DO - 10.1002/sdtp.14171

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ER -

Glass substrate charging in flat panel display manufacturing

Abstract

Keywords

ASJC Scopus subject areas

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