Glass substrate charging in flat panel display manufacturing

Robert G. Manley*, Nicholas J. Smith, Nikolay Zhelev, Indrani Bhattacharyya, Dean Thelen, Elena Streltsova, Wanda Walczak, Jonathan Mis, Gabriel Agnello

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

3 Scopus citations


As technology in the arena of flat panel display progresses, panels are becoming larger, with higher pixel density and smaller device geometries. The glass sheets utilized in said panel fabrication processes are getting larger in area with Gen 10.5 (2940 mm × 3370 mm × 0.5 mm) sheets currently in mass production. With the increase in glass substrate size and decrease in the dimensions of devices fabricated on them, the continued trend will be towards greater sensitivity to electrostatic charge and possible failure. In this discussion, the role of glass charging in FPD manufacturing is presented, and its characterization is discussed.

Original languageEnglish (US)
Pages (from-to)1498-1501
Number of pages4
JournalDigest of Technical Papers - SID International Symposium
Issue number1
StatePublished - 2020
Event57th SID International Symposium, Seminar and Exhibition, Display Week, 2020 - Virtual, Online
Duration: Aug 3 2020Aug 7 2020


  • ESC
  • ESD
  • Electrostatic charging
  • Electrostatic damage
  • Electrostatic discharge
  • Fabrication
  • Flat panel display
  • Glass
  • TFT
  • Thin-film transistor

ASJC Scopus subject areas

  • General Engineering


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