Growth and characterization of epitaxial Mo/NbN superlattices

A. Madan*, X. Chu, S. A. Barnett

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Scopus citations


Epitaxial Mo/NbN superlattices were grown on MgO(001) substrates by reactive dc magnetron sputtering. The epitaxial relationship between the bcc metal and the NaCl (B1)-structure compound is Mo(001) ∥NbN(001), Mo[110]∥NbN[010], and the lattice mismatch is 1.4% given the 45°rotation about the (001). Cross-sectional transmission electron microscope images show well-defined and relatively planar layers. High angle x-ray diffraction results show up to 25 superlattice reflections extending over ≈30°in 2θ. Kinematical model fits to the x-ray diffraction data suggest that the interface widths were only ≈0.3 nm, presumably because of the immiscibility of Mo and NbN. Initial nanoindentation results indicate hardness values of ≈28 GPa, about 3 times the rule-of-mixtures value.

Original languageEnglish (US)
Pages (from-to)2198
Number of pages1
JournalApplied Physics Letters
StatePublished - 1995

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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