We utilized a miniature sputtering cell with mylar windows and multitarget sputtering guns in order to study the growth of YBCO/LaAlO3 superlattices on SrTiO3 substrates. Computer modeling of the diffraction spectra enabled us to determine the interface width between the layers. After deposition of the superlattices, the substrate temperature was increased to study any interdiffusion.
|Original language||English (US)|
|Number of pages||1|
|Journal||Applied Physics Letters|
|State||Published - Dec 1 1995|
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)