Abstract
The impact of the Bi surfactant layer on the growth of InxGa1-xAs/GaAs heterostructures by molecular beam epitaxy was examined by atomic force microscopy, reflection high energy electron diffraction, X-ray diffraction analysis, and photoluminescence spectroscopy. Results showed that Bi improves the structural and optical quality of InGaAs/GaAs structures by reducing the interfacial roughness and broadening, and by producing more intense photoluminescence peaks than those of heterostructures grown without Bi.
Original language | English (US) |
---|---|
Pages (from-to) | 1232-1236 |
Number of pages | 5 |
Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
Volume | 18 |
Issue number | 3 |
DOIs | |
State | Published - May 2000 |
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering