Growth responses of ultrathin CNx overcoats to process parameters

D. J. Li*, Yip Wah Chung

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Fingerprint

Dive into the research topics of 'Growth responses of ultrathin CNx overcoats to process parameters'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds