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Growth responses of ultrathin CN
x
overcoats to process parameters
D. J. Li
*
,
Yip Wah Chung
*
Corresponding author for this work
Materials Science and Engineering
Research output
:
Contribution to journal
›
Article
›
peer-review
5
Scopus citations
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x
overcoats to process parameters'. Together they form a unique fingerprint.
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INIS
growth
100%
films
100%
substrates
100%
rotation
75%
x radiation
50%
coatings
50%
thickness
50%
reflectivity
50%
surfaces
25%
ion beams
25%
comparative evaluations
25%
sputtering
25%
deposition
25%
performance
25%
density
25%
increasing
25%
configuration
25%
damage
25%
sampling
25%
corrosion
25%
roughness
25%
afm
25%
momentum transfer
25%
Chemistry
Liquid Film
100%
Procedure
100%
Rotation
75%
Reflectivity
50%
X-Ray
50%
Thickness
50%
Atomic Force Microscopy
25%
Ion Beam
25%
Momentum Transfer
25%
Magnetron Sputtering
25%
Corrosion
25%
Analytical Method
25%
Surface
25%
Density
25%
Sampling
25%
Roughness
25%
Material Science
Reflectivity
100%
Coating
100%
Magnetron Sputtering
50%
Film Thickness
50%
Surface
50%
Density
50%
Film Growth
50%
Corrosion
50%
Biochemistry, Genetics and Molecular Biology
Rotation
100%
Growth
100%
X Ray
66%
Thickness
66%
Surface Property
33%
Corrosion
33%
Sampling
33%
Density
33%
Medicine and Dentistry
Measurement
100%
Growth
100%
X-Ray
100%
Analysis
50%